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6 Inch C-plane(0001) Sapphire Wafers

6 Inch C-plane(0001) Sapphire Wafers

Based on the continuous upgrade of sapphire technology and the rapid expansion of the application market, 4 inch and 6 inch substrate wafers will be more adopted by mainstream chip companies due to their inherent advantages in production utilization.

CRYSCORE supplies a wide range of sapphire wafers either from stock or custom made to your specification for various applications. The Epi-Ready grade sapphire wafers have no particles, no cracks or pores, no scratches, or other defects. All the wafers and sapphire substrates are traceable with respect to the cassette numbers marked on the label.

6 Inch C-plane(0001) Sapphire Wafers 6 Inch C-plane(0001) Sapphire Wafers
Specifications of 6 Inch C-plane(0001) Sapphire Wafers

Item6-inch C-plane(0001) 1300μm Sapphire Wafers
Crystal Materials99,999%, High Purity, Monocrystalline Al2O3
GradePrime, Epi-Ready
Surface OrientationC-plane(0001)
C-plane off-angle toward M-axis 0.2 +/- 0.1°
Diameter150.0 mm +/- 0.2 mm
Thickness1300 μm +/- 25 μm
Primary Flat OrientationA-plane(11-20) +/- 0.2°
Primary Flat Length47.0 mm +/- 1.0 mm
Single Side PolishedFront SurfaceEpi-polished, Ra < 0.2 nm (by AFM)
(SSP)Back SurfaceFine ground, Ra = 0.8 μm to 1.2 μm
Double Side PolishedFront SurfaceEpi-polished, Ra < 0.2 nm (by AFM)
(DSP)Back SurfaceEpi-polished, Ra < 0.2 nm (by AFM)
TTV< 25 μm
BOW< 25 μm
WARP< 25 μm
Cleaning / PackagingClass 100 cleanroom cleaning and vacuum packaging,
25 pieces in one cassette packaging or single piece packaging.

Note: Custom sapphire wafers with any orientation and any thickness can be provided.

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